X轴轮廓形状测量速度(mm/s) | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 |
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指令精度 X轴轮廓形状 | ± (0.8 + 0.01 L) μm L = 驱动长度 (mm) 宽范围:1.8 μm / 100 mm 窄范围:1.05 μm / 25 mm | ± (0.8 + 0.01 L) μm L = 驱动长度 (mm) 宽范围:1.8 μm / 100 mm 窄范围:1.05 μm / 25 mm | ± (0.8 + 0.01 L) μm L = 驱动长度 (mm) 宽范围:1.8 μm / 100 mm 窄范围:1.05 μm / 25 mm | ± (0.8 + 0.01 L) μm L = 驱动长度 (mm) 宽范围:1.8 μm / 100 mm 窄范围:1.05 μm / 25 mm | ± (0.8 + 0.015 L) μm L = 驱动长度 (mm) 宽范围:3.8 μm / 200 mm 窄范围:1.2 μm / 25 mm | ± (0.8 + 0.015 L) μm L = 驱动长度 (mm) 宽范围:3.8 μm / 200 mm 窄范围:1.2 μm / 25 mm | ± (0.8 + 0.015 L) μm L = 驱动长度 (mm) 宽范围:3.8 μm / 200 mm 窄范围:1.2 μm / 25 mm | ± (0.8 + 0.015 L) μm L = 驱动长度 (mm) 宽范围:3.8 μm / 200 mm 窄范围:1.2 μm / 25 mm |
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